Its interesting how the MEMS design development is paralleling the IC design methodology of yesteryear. The process appears to be very similar,only the parameters seem to change. We also see UC Berkeley developing methodology and CAD tools. MIT is also an early entrant into the CAD Tool fray. Commercially available tools from Coventor are available ( for a significant cost) but may be the best deal for the design engineer interested in end results rather than the process. It remains to be seen how this whole industry pans out. However, already there are large numbers of MEMS devices working in commercial systems so the MEMS approach is beginning to make sense. Contact SPG at http://www.signalpro.biz for our experince with MEMS related issues.